TY  - RPRT
TI  - Preferentially orientated E-beam TiN thin films using focused jet of nitrogen gas
AU  - R. Ramaseshan
AU  - Feby Jose
AU  - S. Rajagopalan
AU  - S. Dash
PY  - 2014
UR  - https://arxiv.org/abs/1410.1277
ID  - 1410.1277
ER  -