@misc{indiciaedfdeb077ae04,
  title = {Growth of alpha-beta phase W thin films over steep Al topography in a confocal sputtering machine},
  author = {John Mark Kreikebaum and Blas Cabrera and Jeff Yen and Paul Brink and Astrid Tomada and Matt Cherry and Betty Young},
  year = {2014},
  url = {https://arxiv.org/abs/1410.2611},
  note = {Source identifier: 1410.2611}
}