TY  - RPRT
TI  - Performance predictions of a focused ion beam from a laser cooled and compressed atomic beam
AU  - G. ten Haaf
AU  - S. H. W. Wouters
AU  - S. B. van der Geer
AU  - E. J. D. Vredenbregt
AU  - P. H. A. Mutsaers
PY  - 2015
DO  - 10.1063/1.4905022
UR  - https://arxiv.org/abs/1410.4362
ID  - 1410.4362
ER  -