@misc{indiciaebd0e70ea2487,
  title = {A variational approach to the inverse photolithography problem},
  author = {Luca Rondi and Fadil Santosa and Zhu Wang},
  year = {2014},
  doi = {10.1137/140991868},
  url = {https://arxiv.org/abs/1410.4463},
  note = {Source identifier: 1410.4463}
}