TY  - RPRT
TI  - A variational approach to the inverse photolithography problem
AU  - Luca Rondi
AU  - Fadil Santosa
AU  - Zhu Wang
PY  - 2014
DO  - 10.1137/140991868
UR  - https://arxiv.org/abs/1410.4463
ID  - 1410.4463
ER  -