@misc{indiciaef4fbe3513c52, title = {Imaging and registration of buried atomic-precision donor devices using scanning capacitance microscopy}, author = {E. Bussmann and M. Rudolph and G. S. Subramania and S. Misra and S. M. Carr and E. Langlois and J. Dominguez and T. Pluym and M. P. Lilly and M. S. Carroll}, year = {2014}, url = {https://arxiv.org/abs/1410.4793}, note = {Source identifier: 1410.4793} }