TY  - RPRT
TI  - Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
AU  - A. Derzsi
AU  - I. Korolov
AU  - E. Schuengel
AU  - Z. Donko
AU  - J. Schulze
PY  - 2015
DO  - 10.1088/0963-0252/24/3/034002
UR  - https://arxiv.org/abs/1411.2464
ID  - 1411.2464
ER  -