@misc{indiciaec38918708766, title = {Substrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition}, author = {Bruno Dlubak and Piran R. Kidambi and Robert S. Weatherup and Stephan Hofmann and John Robertson}, year = {2014}, doi = {10.1063/1.4707376}, url = {https://arxiv.org/abs/1411.3484}, note = {Source identifier: 1411.3484} }