@misc{indiciae66c8634d66a5,
  title = {Characterization of TiAlSiON Coatings Deposited by Plasma Enhanced Magnetron Sputtering: XRD, XPS, and DFT Studies},
  author = {A. S. Kamenetskih and A. I. Kukharenko and E. Z. Kurmaev and N. A. Skorikov and N. V. Gavrilov and S. O. Cholakh and A. V. Chukin and V. M. Zainullina and M. A. Korotin},
  year = {2014},
  url = {https://arxiv.org/abs/1411.3859},
  note = {Source identifier: 1411.3859}
}