TY  - RPRT
TI  - Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes
AU  - A Dolgov
AU  - O Yakushev
AU  - A Abrikosov
AU  - E Snegirev
AU  - V M Krivtsun
AU  - C J Lee
AU  - F Bijkerk
PY  - 2014
DO  - 10.1088/0963-0252/24/3/035003
UR  - https://arxiv.org/abs/1411.4505
ID  - 1411.4505
ER  -