@misc{indiciae4757566e5b30,
  title = {Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source},
  author = {A Dolgov and D Lopaev and C J Lee and E Zoethout and V. Medvedev and O Yakushev and F Bijkerk},
  year = {2014},
  doi = {10.1016/j.apsusc.2015.06.079},
  url = {https://arxiv.org/abs/1411.4509},
  note = {Source identifier: 1411.4509}
}