@misc{indiciae48c9470406ad,
  title = {Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography},
  author = {Heiko Wolf and Colin Rawlings and Philipp Mensch and James L. Hedrick and Daniel J. Coady and Urs Duerig and Armin W. Knoll},
  year = {2014},
  doi = {10.1116/1.4901413},
  url = {https://arxiv.org/abs/1411.4833},
  note = {Source identifier: 1411.4833}
}