@misc{indiciaedca53b8bee39,
  title = {Si\$\_3\$N\$\_4\$ nanobeam optomechanical crystals},
  author = {Karen E. Grutter and Marcelo Davanco and Kartik Srinivasan},
  year = {2014},
  url = {https://arxiv.org/abs/1411.5996},
  note = {Source identifier: 1411.5996}
}