TY - RPRT TI - Analytic model of the energy distribution function for highly energetic electrons in magnetron plasmas AU - Sara Gallian AU - Jan Trieschmann AU - Thomas Mussenbrock AU - Ralf Peter Brinkmann AU - William N. G. Hitchon PY - 2015 DO - 10.1063/1.4905943 UR - https://arxiv.org/abs/1411.6793 ID - 1411.6793 ER -