@misc{indiciaeac22a22c5721,
  title = {Realization of a diamond based high density multi electrode array by means of deep ion beam lithography},
  author = {Federico Picollo and Alfio Battiato and Ettore Bernardi and Luca Boarino and Emanuele Enrico and Jacopo Forneris and Daniele Gatto Monticone and Paolo Olivero},
  year = {2014},
  doi = {10.1016/j.nimb.2014.11.119},
  url = {https://arxiv.org/abs/1412.2212},
  note = {Source identifier: 1412.2212}
}