TY  - RPRT
TI  - Realization of a diamond based high density multi electrode array by means of deep ion beam lithography
AU  - Federico Picollo
AU  - Alfio Battiato
AU  - Ettore Bernardi
AU  - Luca Boarino
AU  - Emanuele Enrico
AU  - Jacopo Forneris
AU  - Daniele Gatto Monticone
AU  - Paolo Olivero
PY  - 2014
DO  - 10.1016/j.nimb.2014.11.119
UR  - https://arxiv.org/abs/1412.2212
ID  - 1412.2212
ER  -