TY  - RPRT
TI  - Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
AU  - Robert Franz
AU  - Peter Polcik
AU  - André Anders
PY  - 2015
DO  - 10.1016/j.surfcoat.2015.03.047
UR  - https://arxiv.org/abs/1412.5772
ID  - 1412.5772
ER  -