@misc{indiciae9dd3a4d6755f,
  title = {Nano-artifact metrics based on random collapse of resist},
  author = {Tsutomu Matsumoto and Morihisa Hoga and Yasuyuki Ohyagi and Mikio Ishikawa and Makoto Naruse and Kenta Hanaki and Ryosuke Suzuki and Daiki Sekiguchi and Naoya Tate and Motoichi Ohtsu},
  year = {2014},
  doi = {10.1038/srep06142},
  url = {https://arxiv.org/abs/1412.6271},
  note = {Source identifier: 1412.6271}
}