@misc{indiciaedb5a50a4904f, title = {Generation of Ensembles of Individually Resolvable Nitrogen Vacancies Using Nanometer-Scale Apertures in Ultrahigh-Aspect Ratio Planar Implantation Masks}, author = {Igal Bayn and Edward H. Chen and Matthew E. Trusheim and Luozhou Li and Tim Schröder and Ophir Gaathon and Ming Lu and Aaron Stein and Mingzhao Liu and Kim Kisslinger and Hannah Clevenson and Dirk Englund}, year = {2014}, doi = {10.1021/nl504441m}, url = {https://arxiv.org/abs/1412.6600}, note = {Source identifier: 1412.6600} }