@misc{indiciaed56beaed7e23,
  title = {Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description},
  author = {Rostislav V. Lapshin},
  year = {2015},
  doi = {10.1016/j.apsusc.2015.10.108},
  url = {https://arxiv.org/abs/1501.05545},
  note = {Source identifier: 1501.05545}
}