@misc{indiciaede0a3e6f8e41,
  title = {Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Virtual mode},
  author = {Rostislav V. Lapshin},
  year = {2015},
  doi = {10.1016/j.apsusc.2016.03.201},
  url = {https://arxiv.org/abs/1501.05726},
  note = {Source identifier: 1501.05726}
}