TY  - RPRT
TI  - Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Virtual mode
AU  - Rostislav V. Lapshin
PY  - 2015
DO  - 10.1016/j.apsusc.2016.03.201
UR  - https://arxiv.org/abs/1501.05726
ID  - 1501.05726
ER  -