@misc{indiciaed0151cce6616,
  title = {Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode},
  author = {Rostislav V. Lapshin},
  year = {2015},
  doi = {10.1016/j.apsusc.2018.10.149},
  url = {https://arxiv.org/abs/1501.06679},
  note = {Source identifier: 1501.06679}
}