TY  - RPRT
TI  - Identification of annealing temperature for high-$κ$-based gate oxides using differential scanning calorimetry
AU  - Debaleen Biswas
AU  - Anil Kumar Sinha
AU  - Supratic Chakraborty
PY  - 2015
DO  - 10.1116/1.4929442
UR  - https://arxiv.org/abs/1502.01889
ID  - 1502.01889
ER  -