@misc{indiciae73fe43b2b041,
  title = {Surface quality improvement of porous thin films suitable for nanoindentation},
  author = {Zhangwei Chen and Xin Wang and Finn Giuliani and Alan Atkinson},
  year = {2015},
  doi = {10.1016/j.ceramint.2013.08.035},
  url = {https://arxiv.org/abs/1502.02133},
  note = {Source identifier: 1502.02133}
}