TY - RPRT TI - Surface quality improvement of porous thin films suitable for nanoindentation AU - Zhangwei Chen AU - Xin Wang AU - Finn Giuliani AU - Alan Atkinson PY - 2015 DO - 10.1016/j.ceramint.2013.08.035 UR - https://arxiv.org/abs/1502.02133 ID - 1502.02133 ER -