@misc{indiciaed1d8420a3606,
  title = {Combined AES/Factor Analysis and RBS Investigation of a Thermally Treated Pt/Ti Metallisation on SiO2},
  author = {U. Scheithauer and W. Hösler and R. Bruchhaus},
  year = {2015},
  doi = {10.1007/bf00321438},
  url = {https://arxiv.org/abs/1502.03413},
  note = {Source identifier: 1502.03413}
}