TY  - RPRT
TI  - Combined AES/Factor Analysis and RBS Investigation of a Thermally Treated Pt/Ti Metallisation on SiO2
AU  - U. Scheithauer
AU  - W. Hösler
AU  - R. Bruchhaus
PY  - 2015
DO  - 10.1007/bf00321438
UR  - https://arxiv.org/abs/1502.03413
ID  - 1502.03413
ER  -