@misc{indiciaef1318ce88d2d,
  title = {Examples for the improvements in AES Depth Profiling of Multilayer Thin Film Systems by Application of Factor Analysis Data Evaluation},
  author = {Uwe Scheithauer},
  year = {2015},
  doi = {10.1007/bf00322089},
  url = {https://arxiv.org/abs/1502.03652},
  note = {Source identifier: 1502.03652}
}