TY  - RPRT
TI  - Examples for the improvements in AES Depth Profiling of Multilayer Thin Film Systems by Application of Factor Analysis Data Evaluation
AU  - Uwe Scheithauer
PY  - 2015
DO  - 10.1007/bf00322089
UR  - https://arxiv.org/abs/1502.03652
ID  - 1502.03652
ER  -