@misc{indiciae6dbb1ba030ad,
  title = {Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates},
  author = {A. Bruno and G. de Lange and S. Asaad and K. L. van der Enden and N. K. Langford and L. DiCarlo},
  year = {2015},
  doi = {10.1063/1.4919761},
  url = {https://arxiv.org/abs/1502.04082},
  note = {Source identifier: 1502.04082}
}