TY  - RPRT
TI  - Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
AU  - A. Bruno
AU  - G. de Lange
AU  - S. Asaad
AU  - K. L. van der Enden
AU  - N. K. Langford
AU  - L. DiCarlo
PY  - 2015
DO  - 10.1063/1.4919761
UR  - https://arxiv.org/abs/1502.04082
ID  - 1502.04082
ER  -