@misc{indiciae67a896177dcb,
  title = {Improved Sputter Depth Resolution in Auger Thin Film Analysis Using In Situ Low Angle Cross-Sections},
  author = {Uwe Scheithauer},
  year = {2015},
  doi = {10.1016/s0169-4332(01)00257-4},
  url = {https://arxiv.org/abs/1502.04832},
  note = {Source identifier: 1502.04832}
}