TY  - RPRT
TI  - Improved Sputter Depth Resolution in Auger Thin Film Analysis Using In Situ Low Angle Cross-Sections
AU  - Uwe Scheithauer
PY  - 2015
DO  - 10.1016/s0169-4332(01)00257-4
UR  - https://arxiv.org/abs/1502.04832
ID  - 1502.04832
ER  -