@misc{indiciae35be450f6975,
  title = {A TEM study of Si-SiO2 interfaces in silicon nanodevices},
  author = {Paul Spizzirri and Sergey Rubanov and Eric Gauja and Laurens Willems van Beveren and Rolf Brenner and Steven Prawer},
  year = {2015},
  url = {https://arxiv.org/abs/1503.00785},
  note = {Source identifier: 1503.00785}
}