@misc{indiciae7e6359890f2c,
  title = {Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF\$\_6\$ plasma treatment},
  author = {Christian Osterkamp and Johannes Lang and Jochen Scharpf and Christoph Müller Liam Paul McGuinness and Thomas Diemant and R. J. Behm and Boris Naydenov and Fedor Jelezko},
  year = {2015},
  doi = {10.1063/1.4915305},
  url = {https://arxiv.org/abs/1503.06672},
  note = {Source identifier: 1503.06672}
}