TY  - RPRT
TI  - Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF$_6$ plasma treatment
AU  - Christian Osterkamp
AU  - Johannes Lang
AU  - Jochen Scharpf
AU  - Christoph Müller Liam Paul McGuinness
AU  - Thomas Diemant
AU  - R. J. Behm
AU  - Boris Naydenov
AU  - Fedor Jelezko
PY  - 2015
DO  - 10.1063/1.4915305
UR  - https://arxiv.org/abs/1503.06672
ID  - 1503.06672
ER  -