@misc{indiciae10aba3a24167,
  title = {Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in Asymmetric RF-DC Discharge},
  author = {Alexander V. Khrabrov and Igor D. Kaganovich and Peter L. G. Ventzek and Alok Ranjan and Lee Chen},
  year = {2015},
  doi = {10.1088/0963-0252/24/5/054003},
  url = {https://arxiv.org/abs/1503.07748},
  note = {Source identifier: 1503.07748}
}