TY  - RPRT
TI  - Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in Asymmetric RF-DC Discharge
AU  - Alexander V. Khrabrov
AU  - Igor D. Kaganovich
AU  - Peter L. G. Ventzek
AU  - Alok Ranjan
AU  - Lee Chen
PY  - 2015
DO  - 10.1088/0963-0252/24/5/054003
UR  - https://arxiv.org/abs/1503.07748
ID  - 1503.07748
ER  -