TY - RPRT TI - An Experimental Study of Waveguide Coupled Microwave Heating with Conventional Multicusp Negative Ion Source AU - J. Komppula AU - T. Kalvas AU - H. Koivisto AU - J. Laulainen AU - O. Tarvainen PY - 2015 DO - 10.1063/1.4916484 UR - https://arxiv.org/abs/1503.08061 ID - 1503.08061 ER -