TY  - RPRT
TI  - Double layer formation in the expanding region of an inductively coupled electronegative plasma
AU  - N. Plihon
AU  - C. S. Corr
AU  - P. Chabert
PY  - 2015
DO  - 10.1063/1.1869533
UR  - https://arxiv.org/abs/1504.02313
ID  - 1504.02313
ER  -