@misc{indiciae5f42172b1aa6,
  title = {Reducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross Sectioning},
  author = {Uwe Scheithauer},
  year = {2015},
  doi = {10.1016/j.elspec.2015.04.012},
  url = {https://arxiv.org/abs/1504.04282},
  note = {Source identifier: 1504.04282}
}