TY  - RPRT
TI  - Reducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross Sectioning
AU  - Uwe Scheithauer
PY  - 2015
DO  - 10.1016/j.elspec.2015.04.012
UR  - https://arxiv.org/abs/1504.04282
ID  - 1504.04282
ER  -