@misc{indiciaec575e3afa100, title = {Better 3D Inspection with Structured Illumination Part I: Signal Formation and Precision}, author = {Zheng Yang and Alexander Kessel and Gerd Häusler}, year = {2015}, doi = {10.1364/ao.54.006652}, url = {https://arxiv.org/abs/1504.04556}, note = {Source identifier: 1504.04556} }