TY  - RPRT
TI  - Better 3D Inspection with Structured Illumination Part I: Signal Formation and Precision
AU  - Zheng Yang
AU  - Alexander Kessel
AU  - Gerd Häusler
PY  - 2015
DO  - 10.1364/ao.54.006652
UR  - https://arxiv.org/abs/1504.04556
ID  - 1504.04556
ER  -