TY  - RPRT
TI  - Electronic stress tensor analysis of molecules in gas phase of CVD process for GeSbTe alloy
AU  - Hiroo Nozaki
AU  - Yuji Ikeda
AU  - Kazuhide Ichikawa
AU  - Akitomo Tachibana
PY  - 2015
DO  - 10.1002/jcc.23920
UR  - https://arxiv.org/abs/1504.06910
ID  - 1504.06910
ER  -