@misc{indiciaec10f21b5f295,
  title = {Advanced scanning probe lithography},
  author = {Ricardo Garcia and Armin W. Knoll and Elisa Riedo},
  year = {2015},
  doi = {10.1038/nnano.2014.157},
  url = {https://arxiv.org/abs/1505.01260},
  note = {Source identifier: 1505.01260}
}