TY  - RPRT
TI  - Advanced scanning probe lithography
AU  - Ricardo Garcia
AU  - Armin W. Knoll
AU  - Elisa Riedo
PY  - 2015
DO  - 10.1038/nnano.2014.157
UR  - https://arxiv.org/abs/1505.01260
ID  - 1505.01260
ER  -