@misc{indiciaebbdf472feab4,
  title = {Suppression of excess oxygen for environmentally stable amorphous In-Si-O thin-film transistors},
  author = {Shinya Aikawa and Nobuhiko Mitoma and Takio Kizu and Toshihide Nabatame and Kazuhito Tsukagoshi},
  year = {2015},
  doi = {10.1063/1.4921054},
  url = {https://arxiv.org/abs/1505.01628},
  note = {Source identifier: 1505.01628}
}