TY  - RPRT
TI  - Suppression of excess oxygen for environmentally stable amorphous In-Si-O thin-film transistors
AU  - Shinya Aikawa
AU  - Nobuhiko Mitoma
AU  - Takio Kizu
AU  - Toshihide Nabatame
AU  - Kazuhito Tsukagoshi
PY  - 2015
DO  - 10.1063/1.4921054
UR  - https://arxiv.org/abs/1505.01628
ID  - 1505.01628
ER  -